Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 9, 2010
Patent Application Number
11418453
Date Filed
May 5, 2006
Patent Primary Examiner
Patent abstract
According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.
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