US Patent 7675606 Lithographic apparatus and method
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Patent abstract
According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.
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US Patent 07675606 Lithographic apparatus and method US Patent 7675606 Lithographic apparatus and method
Infobox
Patent Number
0767560600
Patent Number
767560600
Edits on 5 Apr, 2023
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Infobox
Is a
Patent Jurisdiction
Patent Number
076756060
Date of Patent
March 9, 2010
0Patent Application Number
114184530
Date Filed
May 5, 2006
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
076756060
Date of Patent
March 9, 2010
0Patent Application Number
114184530
Date Filed
May 5, 2006
0Official Website
Patent Primary Examiner
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US Patent 07675606 Lithographic apparatus and method
Infobox
Is a
Patent jurisdiction
Patent number
07675606
Date of patent
March 9, 2010
Patent application number
11418453
Date Filed
May 5, 2006
Patent primary examiner
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