Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert D. Tolles0
Date of Patent
March 16, 2010
0Patent Application Number
113754800
Date Filed
March 13, 2006
0Patent Primary Examiner
Patent abstract
A polishing pad has a polishing layer with a polishing surface and a first registration mark, and a backing layer connected to the polishing layer and having a second registration mark aligned with the first registration mark. The polishing pad may have a window that includes an aperture in the backing layer aligned with a solid transparent portion in the polishing layer.
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