US Patent 7677959 Multilayer polishing pad and method of making
Patent 7677959 was granted and assigned to Applied Materials on March, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A polishing pad has a polishing layer with a polishing surface and a first registration mark, and a backing layer connected to the polishing layer and having a second registration mark aligned with the first registration mark. The polishing pad may have a window that includes an aperture in the backing layer aligned with a solid transparent portion in the polishing layer.
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Patent Inventor Names
Robert D. Tolles0
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US Patent 07677959 Multilayer polishing pad and method of making US Patent 7677959 Multilayer polishing pad and method of making
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Patent Number
076779590
Patent Number
76779590
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Current Assignee
Patent Jurisdiction
Patent Number
076779590
Date of Patent
March 16, 2010
0Patent Application Number
113754800
Date Filed
March 13, 2006
0Official Website
Patent Primary Examiner
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US Patent 07677959 Multilayer polishing pad and method of making
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07677959
Date of patent
March 16, 2010
Patent application number
11375480
Date Filed
March 13, 2006
Patent primary examiner
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