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US Patent 7692317 Apparatus for housing a micromechanical structure

Patent 7692317 was granted and assigned to Infineon Technologies on April, 2010 by the United States Patent and Trademark Office.

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Patent abstract

Apparatus for housing a micromechanical structure, and a method for producing the housing. The apparatus has a substrate having a main side on which the micromechanical structure is formed, a photo-resist material structure surrounding the micromechanical structure to form a cavity together with the substrate between the substrate and the photo-resist material structure, wherein the cavity separates the micromechanical structure and the photo-resist material structure and has an opening, and a closure for closing the opening to close the cavity.

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