Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Helmar Van Santen0
Yvonne Wendela Kruijt-Stegeman0
Aleksey Yurievich Kolesnychenko0
Date of Patent
April 6, 2010
0Patent Application Number
111388990
Date Filed
May 27, 2005
0Patent Primary Examiner
Patent abstract
A lithographic apparatus is disclosed that has a template holder configured to hold an imprint template, a substrate table arranged to receive a substrate, a radiation output arranged to illuminate a part of the imprint template, and a detector configured to detect radiation scattered from an interface between the imprint template and imprintable material provided on the substrate.
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