US Patent 7692771 Imprint lithography
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Patent abstract
A lithographic apparatus is disclosed that has a template holder configured to hold an imprint template, a substrate table arranged to receive a substrate, a radiation output arranged to illuminate a part of the imprint template, and a detector configured to detect radiation scattered from an interface between the imprint template and imprintable material provided on the substrate.
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Patent Inventor Names
Aleksey Yurievich Kolesnychenko0
Helmar Van Santen0
Yvonne Wendela Kruijt-Stegeman0
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US Patent 07692771 Imprint lithography US Patent 7692771 Imprint lithography
Infobox
Patent Number
076927710
Patent Number
76927710
Edits on 25 Sep, 2022
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Infobox
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Patent Jurisdiction
Patent Number
076927710
Date of Patent
April 6, 2010
0Patent Application Number
111388990
Date Filed
May 27, 2005
0Official Website
Patent Primary Examiner
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US Patent 07692771 Imprint lithography
Infobox
Is a
Patent jurisdiction
Patent number
07692771
Date of patent
April 6, 2010
Patent application number
11138899
Date Filed
May 27, 2005
Patent primary examiner
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