Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yushi Kaneko0
Sou Kamimura0
Date of Patent
April 13, 2010
Patent Application Number
12053927
Date Filed
March 24, 2008
Patent Primary Examiner
Patent abstract
A resist composition comprises (A) at least two kinds of resins each of which decomposes by the action of an acid to undergo an increase in its solubility for an alkali developer, wherein at least one kind of the resins (A) is a resin synthesized by living radical polymerization using a chain transfer agent represented by formula (I):
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