US Patent 7696494 Beam angle adjustment in ion implanters
Patent 7696494 was granted and assigned to Axcelis Technologies on April, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A steering component is included in an ion implantation system to direct or “steer” an ion beam to a scan vertex of a scanning component downstream of the steering component. In this manner, the scan vertex of the scanning component coincides with the focal point of a parallelizing component downstream of the scanning component. This allows the beam to emerge from the parallelizing component at an expected angle so that ions can be implanted in a desired manner into a workpiece located downstream of the parallelizing component.
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US Patent 07696494 Beam angle adjustment in ion implanters US Patent 7696494 Beam angle adjustment in ion implanters
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Patent Number
0769649400
Patent Number
769649400
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076964940
Date of Patent
April 13, 2010
0Patent Application Number
117570630
Date Filed
June 1, 2007
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076964940
Date of Patent
April 13, 2010
0Patent Application Number
117570630
Date Filed
June 1, 2007
0Official Website
Patent Primary Examiner
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US Patent 07696494 Beam angle adjustment in ion implanters
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07696494
Date of patent
April 13, 2010
Patent application number
11757063
Date Filed
June 1, 2007
Patent primary examiner
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