US Patent 7696494 Beam angle adjustment in ion implanters
Patent 7696494 was granted and assigned to Axcelis Technologies on April, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 1, 2007
Date of Patent
April 13, 2010
Patent Application Number
11757063
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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