Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhibiao Mao0
Gary Ganghui Teng0
George G. Barclay0
Wang Yueh0
Anthony Zampini0
Ashish Pandya0
Date of Patent
April 20, 2010
0Patent Application Number
103139540
Date Filed
December 6, 2002
0Patent Primary Examiner
Patent abstract
The present invention relates to new polymers that contain repeat units of phenol and photoacid-labile esters that contain an alicyclic group, preferably a bulky group that suitably may contain 7 to about 20 carbons, such as an alkyladamantyl, ethylfencyl, tricyclo decanyl, or pinanyl group. Polymers of the invention are useful as a component of chemically-amplified positive-acting resists.
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