Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 4, 2010
Patent Application Number
12109548
Date Filed
April 25, 2008
Patent Primary Examiner
Patent abstract
A surface defect inspection apparatus is structured to add detection signals of multi-directionally detected scattered lights to detect a tiny defect and to individually process the respective detection signals to prevent an error failing to detect an anisotropic defect.
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