US Patent 7710557 Surface defect inspection method and apparatus
Patent 7710557 was granted and assigned to Hitachi on May, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A surface defect inspection apparatus is structured to add detection signals of multi-directionally detected scattered lights to detect a tiny defect and to individually process the respective detection signals to prevent an error failing to detect an anisotropic defect.
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US Patent 07710557 Surface defect inspection method and apparatus US Patent 7710557 Surface defect inspection method and apparatus
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Patent Number
0771055700
Patent Number
771055700
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077105570
Date of Patent
May 4, 2010
0Patent Application Number
121095480
Date Filed
April 25, 2008
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077105570
Date of Patent
May 4, 2010
0Patent Application Number
121095480
Date Filed
April 25, 2008
0Official Website
Patent Primary Examiner
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US Patent 07710557 Surface defect inspection method and apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07710557
Date of patent
May 4, 2010
Patent application number
12109548
Date Filed
April 25, 2008
Patent primary examiner
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