Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 25, 2010
Patent Application Number
11295381
Date Filed
December 6, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
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