US Patent 7722720 Delivery device
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Patent abstract
Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
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US Patent 07722720 Delivery device US Patent 7722720 Delivery device
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Patent Number
0772272000
Patent Number
772272000
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Official Website
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Patent Jurisdiction
Patent Number
077227200
Date of Patent
May 25, 2010
0Patent Application Number
112953810
Date Filed
December 6, 2005
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Is a
Patent Jurisdiction
Patent Number
077227200
Date of Patent
May 25, 2010
0Patent Application Number
112953810
Date Filed
December 6, 2005
0Official Website
Patent Primary Examiner
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US Patent 07722720 Delivery device
Infobox
Is a
Patent jurisdiction
Patent number
07722720
Date of patent
May 25, 2010
Patent application number
11295381
Date Filed
December 6, 2005
Patent primary examiner
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