Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ravinder Aggarwal0
Jeroen Stoutjesdijk0
Date of Patent
May 25, 2010
0Patent Application Number
116555560
Date Filed
January 19, 2007
0Patent Primary Examiner
Patent abstract
A semiconductor processing apparatus including a processing chamber and a plurality of radiant heat sources. The radiant heat sources heat a workpiece within the chamber. At least one of the radiant heat sources is movable during processing in an oscillatory motion along a path less than about 10 mm from a geometric center of the oscillatory motion.
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