US Patent 7725012 Movable radiant heat sources
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Patent abstract
A semiconductor processing apparatus including a processing chamber and a plurality of radiant heat sources. The radiant heat sources heat a workpiece within the chamber. At least one of the radiant heat sources is movable during processing in an oscillatory motion along a path less than about 10 mm from a geometric center of the oscillatory motion.
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Patent Inventor Names
Jeroen Stoutjesdijk0
Ravinder Aggarwal0
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Official Website
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US Patent 07725012 Movable radiant heat sources US Patent 7725012 Movable radiant heat sources
Infobox
Patent Number
077250120
Patent Number
77250120
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Patent Jurisdiction
Patent Number
077250120
Date of Patent
May 25, 2010
0Patent Application Number
116555560
Date Filed
January 19, 2007
0Official Website
Patent Primary Examiner
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US Patent 07725012 Movable radiant heat sources
Infobox
Is a
Patent jurisdiction
Patent number
07725012
Date of patent
May 25, 2010
Patent application number
11655556
Date Filed
January 19, 2007
Patent primary examiner
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