Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Herbert Lindner0
Christian Gossmann0
Hanns Wochner0
Date of Patent
June 15, 2010
Patent Application Number
11764246
Date Filed
June 18, 2007
Patent Primary Examiner
Patent abstract
The present invention relates to a method for cleaning polycrystalline silicon fragments to a metal content of <100 ppbw, wherein a polysilicon fraction is added to an aqueous cleaning solution containing HF and H2O2, this aqueous cleaning solution is removed and the polycrystalline fraction thereby obtained is washed with highly pure water and subsequently dried.
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