US Patent 7737035 Dual seal deposition process chamber and process
Patent 7737035 was granted and assigned to Novellus Systems on June, 2010 by the United States Patent and Trademark Office.
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Patent abstract
An apparatus and method for sealing and unsealing a chemical deposition apparatus in a chemical deposition process chamber includes a microvolume that has dual sealing elements at its periphery. One seal, the outer seal, is used to seal the inside of the microvolume from the main process chamber. The second (inner) seal is used to seal the inside of the microvolume from a vacuum source. The apparatus and process of the present invention has several advantages for enhanced chamber performance.
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Patent Inventor Names
Colin F. Smith0
Gary Lind0
John Mazzocco0
Thomas M. Pratt0
William Johanson0
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US Patent 07737035 Dual seal deposition process chamber and process US Patent 7737035 Dual seal deposition process chamber and process
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Patent Number
077370350
Patent Number
77370350
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
077370350
Date of Patent
June 15, 2010
0Patent Application Number
115427230
Date Filed
October 3, 2006
0Official Website
Patent Primary Examiner
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US Patent 07737035 Dual seal deposition process chamber and process
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07737035
Date of patent
June 15, 2010
Patent application number
11542723
Date Filed
October 3, 2006
Patent primary examiner
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