US Patent 7737035 Dual seal deposition process chamber and process
Patent 7737035 was granted and assigned to Novellus Systems on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 3, 2006
0
Date of Patent
June 15, 2010
0
Patent Application Number
11542723
0
Patent Citations Received
Patent Inventor Names
Colin F. Smith
0
Gary Lind
0
John Mazzocco
0
Thomas M. Pratt
0
William Johanson
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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