US Patent 7738119 Optical inspection system for a wafer
Patent 7738119 was granted and assigned to Seiko Instruments on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 17, 2008
Date of Patent
June 15, 2010
Patent Application Number
12015849
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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