Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Abdurrahman Sezginer0
Roy Prasad0
Hsu-Ting Huang0
Chi-Song Horng0
Date of Patent
June 22, 2010
0Patent Application Number
112033300
Date Filed
August 13, 2005
0Patent Primary Examiner
Patent abstract
An apparatus and method of synthesizing a photolithographic data set includes using a first computational model to calculate a first figure-of-merit for the photolithographic data set; changing a first part of the photolithographic data set to increase the first figure-of-merit; and then using a second computational model to calculate a second figure-of-merit of the photolithographic data set; and changing a second part of the photolithographic data set to increase the second figure-of-merit. The second computational model enables figure-of-merit calculations to be executed at a significantly faster execution rate than the first computational model.
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