US Patent 7745329 Tungsten nitride atomic layer deposition processes
Patent 7745329 was granted and assigned to Applied Materials on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 20, 2008
Date of Patent
June 29, 2010
Patent Application Number
12195263
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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