Patent attributes
A method for manufacturing a ferroelectric capacitor includes the steps of: forming a base dielectric film on a substrate, and forming a first plug conductive section in the base dielectric film at a predetermined position; forming, on the base dielectric film, a charge storage section formed from a lower electrode, a ferroelectric film and an upper electrode; forming a stopper film from an insulation material that covers the charge storage section; forming a hydrogen barrier film that covers the stopper film; forming an interlayer dielectric film on the base dielectric film including the hydrogen barrier film; forming, in the interlayer dielectric film, a first contact hole that exposes the first plug conductive section; forming a second contact hole that exposes the upper electrode of the charge storage section by successively etching the interlayer dielectric film, the hydrogen barrier film and the stopper film by using a resist pattern as a mask, and then removing the resist pattern by a wet cleaning treatment; forming an adhesion layer from a conductive material having hydrogen barrier property inside the second contact hole in a manner to cover an upper surface of the upper electrode; forming a second plug conductive section inside the first contact hole; and forming a third plug conductive section inside the second contact hole, wherein the stopper film is formed from a material having a lower etching rate for a cleaning liquid used for the wet cleaning treatment to remove the resist pattern than an etching rate of the hydrogen barrier film for the cleaning liquid.
