US Patent 7763146 Disassembly method and reuse method of substrate mounting member

Patent 7763146 was granted and assigned to NGK Insulators on July, 2010 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

NGK Insulators

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7763146

Date of Patent

July 27, 2010

Patent Application Number

11554099

Date Filed

October 30, 2006

Patent Primary Examiner

‌

Khanh Nguyen

Patent abstract

An electrostatic chuck and a base member are separated from each other while heating up a substrate mounting member to a thermal decomposition temperature within a range from a thermal decomposition starting temperature to a thermal decomposition ending temperature and then softening and decomposing an organic adhesive layer.

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