Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vlad Novotny0
Shaoher X. Pan0
Date of Patent
July 27, 2010
0Patent Application Number
115588830
Date Filed
November 10, 2006
0Patent Primary Examiner
Patent abstract
An encapsulated device includes a micro device on a substrate, a cover bonded to the substrate thereby forming a chamber to encapsulate the micro device, and a desiccant material on the cover and in the chamber. An anti-stiction material is absorbed in the desiccant material.
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