Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alex Sergey Ionkin0
Date of Patent
August 10, 2010
0Patent Application Number
117600010
Date Filed
June 8, 2007
0Patent Primary Examiner
Patent abstract
Provided are liquid compositions suitable for use as immersion liquids in immersion lithography, and immersion lithography processes and apparatus using the compositions.
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