US Patent 7771919 High refractive index fluids for immersion lithography
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Patent abstract
Provided are liquid compositions suitable for use as immersion liquids in immersion lithography, and immersion lithography processes and apparatus using the compositions.
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Patent Inventor Names
Alex Sergey Ionkin0
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US Patent 07771919 High refractive index fluids for immersion lithography US Patent 7771919 High refractive index fluids for immersion lithography
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Patent Number
077719190
Patent Number
77719190
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Patent Jurisdiction
Patent Number
077719190
Date of Patent
August 10, 2010
0Patent Application Number
117600010
Date Filed
June 8, 2007
0Official Website
Patent Primary Examiner
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US Patent 07771919 High refractive index fluids for immersion lithography
Infobox
Is a
Patent jurisdiction
Patent number
07771919
Date of patent
August 10, 2010
Patent application number
11760001
Date Filed
June 8, 2007
Patent primary examiner
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