Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
George W. Orsula0
James W. Thackeray0
Date of Patent
August 17, 2010
0Patent Application Number
119816210
Date Filed
October 31, 2007
0Patent Primary Examiner
Patent abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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