US Patent 7776508 Antihalation compositions
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Patent abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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Patent Inventor Names
George W. Orsula0
James W. Thackeray0
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US Patent 07776508 Antihalation compositions US Patent 7776508 Antihalation compositions
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Patent Number
077765080
Patent Number
77765080
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Official Website
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Patent Jurisdiction
Patent Number
077765080
Date of Patent
August 17, 2010
0Patent Application Number
119816210
Date Filed
October 31, 2007
0Official Website
Patent Primary Examiner
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US Patent 07776508 Antihalation compositions
Infobox
Is a
Patent jurisdiction
Patent number
07776508
Date of patent
August 17, 2010
Patent application number
11981621
Date Filed
October 31, 2007
Patent primary examiner
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