Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sandeep Negi0
Florian Solzbacher0
Rajmohan Bandari0
Date of Patent
August 17, 2010
0Patent Application Number
121296550
Date Filed
May 29, 2008
0Patent Primary Examiner
Patent abstract
A method of fabricating a sub-millimeter scale curved surface on a substrate (10) includes cutting a plurality of trenches (12) of varying depth into the substrate (10). The depth of the trenches (12) corresponds to a desired surface profile. The substrate (10) is etched to remove material left (16) between the trenches to form the curved surface.
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