Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 24, 2010
Patent Application Number
10900394
Date Filed
July 28, 2004
Patent Primary Examiner
Patent abstract
In an immersion lithography apparatus, the immersion liquid is supplied from a tank via a flow restrictor. The liquid held in the tank is maintained at a substantially constant height above the flow restrictor to ensure a constant flow of liquid.
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