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US Patent 7784164 Electronic device manufacturing chamber method

Patent 7784164 was granted and assigned to Applied Materials on August, 2010 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12080571 Substrate processing module and method of moving a workpiece
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Patent abstract

A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.

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Patent Inventor Names
Donald Verplancken0
John M. White0
Shinichi Kurita0
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US Patent 07784164 Electronic device manufacturing chamber method US Patent 7784164 Electronic device manufacturing chamber method

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Patent Number
07784164
Patent Number
7784164
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=07784164
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07784164
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 US Patent 07784164 Electronic device manufacturing chamber method

Infobox
Is a
Patent
Patent
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07784164
Date of patent
August 31, 2010
Patent application number
11214475
Date Filed
August 29, 2005
Patent primary examiner
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Jermie E. Cozart

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