Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuyuki Kasumi0
Eigo Kawakami0
Date of Patent
August 31, 2010
0Patent Application Number
117559730
Date Filed
May 31, 2007
0Patent Primary Examiner
Patent abstract
A processing apparatus configured to transfer a pattern of a mold onto a target member by pressing the mold against a resin applied to the target member includes a driver configured to move the mold and the target member relative to each other, and a controller configured to control the driver so that a changing rate of a load generated between the mold and the resin in a first state is smaller than that in a second state, and the first state being a state in which the mold that adheres to the resin starts moving in a direction separating from the resin, and the second state being a state in which the mold that moves in the direction separating from the resin is about to separate from the resin.
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