Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chia-Tien Peng0
An-Thung Cho0
Ching-Chieh Shih0
Kun-Chih Lin0
Date of Patent
September 7, 2010
0Patent Application Number
122111060
Date Filed
September 16, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for fabricating a photo sensor on an amorphous silicon thin film transistor panel includes forming a photo sensor with a bottom electrode, a silicon-rich dielectric layer, and a top electrode, such that the light sensor has a high reliability. The fabrication method is compatible with the fabrication process of a thin film transistor.
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