Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alec Gallimore0
Joshua Rovey0
Date of Patent
September 7, 2010
Patent Application Number
11828917
Date Filed
July 26, 2007
Patent Primary Examiner
Patent abstract
A gas-fed hollow cathode keeper can reduce ion bombardment erosion by expelling gas through the keeper faceplate. The expelled gas effectively creates a high-pressure “shield” around the keeper such that bombarding ions suffer energy-reducing collisions before impacting the keeper. If the bombarding ion energy is reduced enough, the erosion is eliminated since sputtering is a threshold phenomenon.
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