US Patent 7791260 Gas-fed hollow cathode keeper and method of operating same
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Patent abstract
A gas-fed hollow cathode keeper can reduce ion bombardment erosion by expelling gas through the keeper faceplate. The expelled gas effectively creates a high-pressure “shield” around the keeper such that bombarding ions suffer energy-reducing collisions before impacting the keeper. If the bombarding ion energy is reduced enough, the erosion is eliminated since sputtering is a threshold phenomenon.
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Patent Inventor Names
Alec Gallimore0
Joshua Rovey0
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US Patent 07791260 Gas-fed hollow cathode keeper and method of operating same US Patent 7791260 Gas-fed hollow cathode keeper and method of operating same
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Patent Number
07791260
Patent Number
7791260
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US Patent 07791260 Gas-fed hollow cathode keeper and method of operating same
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Is a
Patent jurisdiction
Patent number
07791260
Date of patent
September 7, 2010
Patent application number
11828917
Date Filed
July 26, 2007
Patent primary examiner
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