Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wilhelmus Maria Corbeij0
Markus Gerardus Martinus Van Kraaij0
Mircea Dusa0
Arie Jeffrey Den Boef0
Date of Patent
September 7, 2010
0Patent Application Number
114515990
Date Filed
June 13, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The illumination profile of a radiation beam is initially measured using a CCD detector. A reference mirror is then placed in the focal plane of the high aperture lens and the reflected radiation measured. By comparing the illumination profile and the detected radiation it is possible to determine the transmission losses for S and P polarisation which can then be used in scatterometry modeling.
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