Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Moritz Nitschke0
Date of Patent
September 14, 2010
Patent Application Number
11944179
Date Filed
November 21, 2007
Patent Citations Received
0
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Patent Primary Examiner
Patent abstract
A plasma power supply system for producing electrical power in the range between 1 kW and 100 kW for a plasma processing system and supplying the power to a plasma chamber through a power line connection, the plasma power supply system includes a power converter, a monitoring section, an arc diverter, a control section with an arc diverter control section and an arc detection section, and an input device wherein the input device is connected to the arc diverter.
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