Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuaki Iwasawa0
Date of Patent
September 28, 2010
0Patent Application Number
116859840
Date Filed
March 14, 2007
0Patent Primary Examiner
Patent abstract
A semiconductor device includes a deposited-type insulating film disposed on a substrate; a coating-type insulating film disposed on a surface of the deposited-type insulating film and having a film density which is lower than a film density of the deposited-type insulating film; and an intermediate insulating film disposed between the deposited-type insulating film and the coating-type insulating film and having a film density which is intermediate between the film density of the deposited-type insulating film and the film density of the coating-type insulating film.
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