US Patent 7803721 Semiconductor device and method of manufacturing same
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Patent abstract
A semiconductor device includes a deposited-type insulating film disposed on a substrate; a coating-type insulating film disposed on a surface of the deposited-type insulating film and having a film density which is lower than a film density of the deposited-type insulating film; and an intermediate insulating film disposed between the deposited-type insulating film and the coating-type insulating film and having a film density which is intermediate between the film density of the deposited-type insulating film and the film density of the coating-type insulating film.
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Patent Inventor Names
Kazuaki Iwasawa0
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Official Website
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US Patent 07803721 Semiconductor device and method of manufacturing same US Patent 7803721 Semiconductor device and method of manufacturing same
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Patent Number
078037210
Patent Number
78037210
Edits on 22 Sep, 2022
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Patent Jurisdiction
Patent Number
078037210
Date of Patent
September 28, 2010
0Patent Application Number
116859840
Date Filed
March 14, 2007
0Official Website
Patent Primary Examiner
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US Patent 07803721 Semiconductor device and method of manufacturing same
Infobox
Is a
Patent jurisdiction
Patent number
07803721
Date of patent
September 28, 2010
Patent application number
11685984
Date Filed
March 14, 2007
Patent primary examiner
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