Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 28, 2010
Patent Application Number
12053213
Date Filed
March 21, 2008
Patent Primary Examiner
Patent abstract
In a p-type clad layer, not only a p-type dopant Zn but also Fe is doped. Its Zn concentration is 1.5×1018 cm−3 and the Fe concentration is 1.8×1017 cm−3. In a semi-insulating burying layer, Fe is doped as an impurity generating a deep acceptor level and the concentration thereof is 6.0×1016 cm−3. The Fe concentration in the p-type clad layer is thus three times higher than the Fe concentration in the burying layer.
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