US Patent 7806983 Substrate temperature control in an ALD reactor
Patent 7806983 was granted and assigned to Novellus Systems on October, 2010 by the United States Patent and Trademark Office.
Name
# Contributions
Last Contribution
Find more entities like US Patent 7806983 Substrate temperature control in an ALD reactor
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
