US Patent 7807340 Photoresists for visible light imaging
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Patent abstract
A method of creating patterned objects using a class of lithographic photoresist combinations is disclosed which is suitable for use with visible light and does not require a post-exposure bake step. The disclosed photoresists are preferably chemical amplification photoresists and contain a photosensitizer having the structure of formula (I):
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US Patent 07807340 Photoresists for visible light imaging US Patent 7807340 Photoresists for visible light imaging
Infobox
Patent Number
0780734000
Patent Number
780734000
Edits on 24 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078073400
Date of Patent
October 5, 2010
0Patent Application Number
120505890
Date Filed
March 18, 2008
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078073400
Date of Patent
October 5, 2010
0Patent Application Number
120505890
Date Filed
March 18, 2008
0Official Website
Patent Primary Examiner
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US Patent 07807340 Photoresists for visible light imaging
Infobox
Is a
Patent jurisdiction
Patent number
07807340
Date of patent
October 5, 2010
Patent application number
12050589
Date Filed
March 18, 2008
Patent primary examiner
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