US Patent 7808611 Lithographic apparatus and device manufacturing method using acidic liquid
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Patent abstract
A lithographic apparatus and device manufacturing method is provided in which exposure is carried out by projecting through a liquid having a pH of less than 7, the liquid being in contact with a substrate to be exposed. The liquid advantageously comprises an anti-reflective topcoat.
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US Patent 07808611 Lithographic apparatus and device manufacturing method using acidic liquid US Patent 7808611 Lithographic apparatus and device manufacturing method using acidic liquid
Infobox
Patent Number
0780861100
Patent Number
780861100
Edits on 6 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078086110
Date of Patent
October 5, 2010
0Patent Application Number
113551920
Date Filed
February 16, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
078086110
Date of Patent
October 5, 2010
0Patent Application Number
113551920
Date Filed
February 16, 2006
0Official Website
Patent Primary Examiner
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US Patent 07808611 Lithographic apparatus and device manufacturing method using acidic liquid
Infobox
Is a
Patent jurisdiction
Patent number
07808611
Date of patent
October 5, 2010
Patent application number
11355192
Date Filed
February 16, 2006
Patent primary examiner
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