US Patent 7812321 Techniques for providing a multimode ion source

Patent 7812321 was granted and assigned to Varian Semiconductor Equipment Associates on October, 2010 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Varian Semiconductor Equipment Associates

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7812321

Date of Patent

October 12, 2010

Patent Application Number

12137225

Date Filed

June 11, 2008

Patent Primary Examiner

‌

David A. Vanore

Patent abstract

Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode.

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