US Patent 7812321 Techniques for providing a multimode ion source
Patent 7812321 was granted and assigned to Varian Semiconductor Equipment Associates on October, 2010 by the United States Patent and Trademark Office.
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Patent abstract
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode.
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US Patent 07812321 Techniques for providing a multimode ion source US Patent 7812321 Techniques for providing a multimode ion source
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Patent Number
0781232100
Patent Number
781232100
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078123210
Date of Patent
October 12, 2010
0Patent Application Number
121372250
Date Filed
June 11, 2008
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078123210
Date of Patent
October 12, 2010
0Patent Application Number
121372250
Date Filed
June 11, 2008
0Official Website
Patent Primary Examiner
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US Patent 07812321 Techniques for providing a multimode ion source
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07812321
Date of patent
October 12, 2010
Patent application number
12137225
Date Filed
June 11, 2008
Patent primary examiner
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