US Patent 7820527 Cleave initiation using varying ion implant dose
Patent 7820527 was granted and assigned to Varian Semiconductor Equipment Associates on October, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 12, 2008
0
Date of Patent
October 26, 2010
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Patent Application Number
12119170
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Patent Citations Received
Patent Inventor Names
Yuri Erokhin
0
Paul J. Sullivan
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Peter Nunan
0
Steven R. Walther
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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