Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 26, 2010
Patent Application Number
11951277
Date Filed
December 5, 2007
Patent Primary Examiner
Patent abstract
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.
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