US Patent 7821693 MEMS mirror with rotation amplification and electromagnetic drive
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Patent abstract
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.
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US Patent 07821693 MEMS mirror with rotation amplification and electromagnetic drive US Patent 7821693 MEMS mirror with rotation amplification and electromagnetic drive
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Patent Number
0782169300
Patent Number
782169300
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Official Website
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Infobox
Is a
Patent Jurisdiction
Patent Number
078216930
Date of Patent
October 26, 2010
0Patent Application Number
119512770
Date Filed
December 5, 2007
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078216930
Date of Patent
October 26, 2010
0Patent Application Number
119512770
Date Filed
December 5, 2007
0Official Website
Patent Primary Examiner
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US Patent 07821693 MEMS mirror with rotation amplification and electromagnetic drive
Infobox
Is a
Patent jurisdiction
Patent number
07821693
Date of patent
October 26, 2010
Patent application number
11951277
Date Filed
December 5, 2007
Patent primary examiner
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